Tin reduction from fluorine doped tin oxide for silicon nanowire-based solar energy harvesting and storage

Hydrogen plasma reduction of fluorine doped tin oxide is a beneficial method to form nanodroplets on the sample surface directly in plasma-enhanced chemical vapor deposition reactor. The formation catalyst droplets crucial initial step for vapor-liquid-solid growth silicon nanowires radial junction solar cells and fuel cell technology. We present an original optical model which allows us trace process soda-lime glass substrate from situ data good agreement with spectroscopic ellipsometry measured before during process. reproduces well phase shift introduced by transition double layer acts as barrier against sodium diffusion. Furthermore, we study real time compare estimated amount produced metallic images scanning electron microscopy.The proposed approach very important real-time monitoring one-pump-down fabrication used grow devices.